Ultra High Vacuum Sputtering System Sputterer and Evaporator

Manufacturing Design Award Winner.
Awarded for Good Manufacturing and Processing Machinery Design.

Ultra High Vacuum Sputtering System Sputterer and Evaporator
by Yong Zhang

  • Awarded April 15, 2021
  • CLIENT: Huaiyin Institute of Technology & Liaoning Petrochemical University
  • 11.363
The system is equipped with multiple UHV chambers: evaporation chamber, sputtering chamber, processing chamber, load lock, electron beam evaporation source. The whole system is fully automatic control, which supports semi-automatic mode, manual mode, and remote maintenance. The UHV Sputter System has neat and intuitive modelling, elaborate surface treatment, smooth and brightening texture, which gives the person a feeling of soft, simple, modern and beautiful. Ergonomic design pursues the details.

The system is equipped with multiple UHV chambers: evaporation chamber, sputtering chamber, processing chamber, load lock, electron beam evaporation source. The whole system is fully automatic control, which supports semi-automatic mode, manual mode, and remote maintenance. The UHV Sputter System has neat and intuitive modelling, elaborate surface treatment, smooth and brightening texture, which gives the person a feeling of soft, simple, modern and beautiful. Ergonomic design pursues the details.

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Good  Design

Ultra High Vacuum Sputtering System Sputterer and Evaporator

Good Design

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Ultra High Vacuum Sputtering System Sputterer and Evaporator

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Ultra High Vacuum Sputtering System Sputterer and Evaporator

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Ultra High Vacuum Sputtering System Sputterer and Evaporator

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Ultra High Vacuum Sputtering System Sputterer and Evaporator

Ultra High Vacuum Sputtering System Sputterer and Evaporator

Yong Zhang

Designer of Ultra High Vacuum Sputtering System Sputterer and Evaporator


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