銅 機械 · 2021
High Vacuum Sputtering System 真空スパッタリング装置
by Yang Yang
- A' Design Award 銅賞 2021 in 機械
- CLIENT: Huaiyin Institute of Technology & Liaoning Petrochemical University
- Estimated Number of Design Views: 73,086
- Verification code EA39666576 · Verify this award
Colors
About High Vacuum Sputtering System 真空スパッタリング装置
高真空スパッタリング装置は、最大300ミリメートルの基板上に金属および誘電体の薄膜を成膜する装置である。本システムは、高周波、直流、またはパルス直流によって駆動されるマグネトロンスパッタリング源を採用し、単独モードまたは同時成膜モードでの稼働が可能である。モジュール構造により、設置、運搬、保守が容易に行える。筐体は板金成形およびスプレー塗装仕上げを施した冷間圧延鋼板で構成され、内部フレームにはアルミニウム、カバーには半透明のグレーのアクリルを用いている。制御画面は人間工学の原則に基づいて設計されている。
About the A' Design Award 銅賞
High Vacuum Sputtering System 真空スパッタリング装置は、創造性、独創性、鋭い洞察力で際立つ傑出したデザインに授与される、高い権威をもつ評価である A' Design Award 銅賞の受賞作品です。銅賞の受賞作品は、十分に巧みで印象的なほど創造的な工芸品であり、デザイナーの豊富な経験、想像力、機知を裏づけています。High Vacuum Sputtering System 真空スパッタリング装置は、高く評価され、称賛され、愛される品であり、顕著にプロフェッショナルで革新的であることが期待されます。この A' Design Award 銅賞を受賞したデザインは、芸術・科学・デザイン・技術のベストプラクティスを取り入れており、細部への配慮に優れています。High Vacuum Sputtering System 真空スパッタリング装置は、ニーズを見事に満たし、欲求に触れ、感情を魅了し、好奇心を引きつけます。
Press Kit
- Unique Properties
- This Ultra High Vacuum Sputtering System subverts the traditional model. On the basis of the functional machine, it integrates many factors for industrial design according to the requirements of the users and the environments. This system mainly adopts modular combination mode, which is convenient for combined installation, transportation and maintenance.The overall shape design is neat and beautiful, the surface treatment is fine, the fuselage is matched with the translucent acrylic mask in gray tone, giving people a simple, modern and beautiful feeling. Ergonomics and interactions are reflected in the design of the control screen.
- Dimensions & Packaging
- Width 2800mm x Depth 1200mm x Height 1500mm
- Tags
- Vacuum magnetron sputtering, UHV SPUTTER，Large equipment
- Production Technology
- The main material of the shell is high quality cold plate, which uses sheet metal forming process and environmental protection spray technology, internal skeleton for aluminum, mask for acrylic material. The fuselage design adopts screen printing process.
- Design Challenge
- The most difficult part of this design exercise is the matching relationship between the whole system, the operating mode, ergonomic design, and the interaction design in the control system.
- Research
- On the market，this kind of products are mainly functional machines, lack of ergonomic design. The surface treatment and texture of material are rough, the modelling lack modern design sense. The Ultra High Voltage Sputter System is a school-enterprise cooperation project completed by designers and engineers jointly. This is an improved product design based on the university's scientific research background and technical conditions of the update and improvement.
- Inspiration
- The Ultra High Vacuum Sputtering System is used in world-famous research laboratories of superconducting and quantum devices. The market is dominated by functional machines with bare devices and circuits, which don’t match the modern and intelligent test environment. Therefore, the integrated design of the system should be carried out to ensure the overall beautiful appearance design, in line with the ergonomic control design and the innovative design of human-computer interaction.
- Project Duration
- The project began in January 2020 in Huai 'an, Jiangsu Province, China, and ended in November 2020 in Huai 'an, Jiangsu Province, China.
- Operation Flow
- Ultra High Vacuum Sputtering System can deposit metal and dielectric thin films on substrates up to 300mm. Magnetron sputtering sources using RF, DC, or pulsed DC power sources can operate in single mode or co-deposition mode to produce films that meet a wide range of requirements.
- Image Credits
- Image #1: Photographer Yang Yang, Variations, 2020.
Image #2: Photographer Lei Wang, Variations, 2020.
Image #3: Photographer Menghua Wang, Variations, 2020.
Image #4: Photographer Lei Wang, Variations, 2020.
Image #5: Photographer Lei Wang, Variations, 2020.
